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Applicable Scope

Purpose

HF oil-free molecular pump unit is a cleaning ultra high vacuum obtaining equipment assembled by molecular pumps of various performances, oil-free pump, switching air escape valve, backing pipeline, water cut-off protector, molecular pump power, and control power, etc. This molecular pump unit is characterized by easy installation, simple operation, convenient connection and reliable performance. It can be widely applied in different fields such as surface analysis, accelerator technology, semiconductor equipment, plasma technology, manufacture of electronic vacuum device, and vacuum technology.

Applicable field

Analytical instruments, gas phase analysis, electron microscope; leak detector, etc.

Working application

Kinescope field, CD manufacturing, coating industry, electron beam welding equipment, ITO production line, OLED production line, curtain wall glass production line, ion etching, semiconductor manufacturing industry, vacuum furnace, vacuum transportation, light producing industry, food packing and electronic vacuum industry, etc. 

Scientific research field

Vacuum technology fields such as high-energy physics, surface physics, scientific research instruments, and space research, etc.

Performance and Specification

Main performance parameters

 
 

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